SPECIFICATIONS

• Resolution   6.0nm(Tungsten filament)
• Magnification   15×～250,000×
• Electron Optical System

Electron gun:Tungsten emitter

Accelerating voltage:0-30kV
Lens system:Three electron magnetic lens system
Objective lens aperture:Three apertures selectable

• Specimen Chamber

Six ports for WDS,EDS,BSE detectors and other attachment installation.

• Specimen Stage

Standard stage Displacement:X and Y lateral motions 50mm,Z motion

25mm,tilt 5°, 90°,360°continuous rotation
Large stage Displacement:X lateral motion 80mm,Y lateral motion 50mm,Z

motion 30mm,tilt0°, 90°,360°continuous rotation

• Computer System

PC compatible,microsoft™ Windows™ XP operation system

• Image Display

Digital image,1024×768 frame and display resolution
Scanning mode:Full frame,plane,line,spot,selected area dual magnification and screen split
17-inch colour viewing monitor

• Operate And Control Software

The brand new design operate operate software,SEM control by using keyboard and mouse only.Versatile automatic function.Parameters of SEM operation can be stored and easily managed.

• Image Processing And Analyzing

Image enhancement,Threshold transformation,particle statistic analysis,Morphology transformation,Gray level histogram display and pseudo-colour transform for gray scale image

• Image Output And Record

Versatile image document formats,support digital monochrome printer and
versatile print out equipment with standard interface

• Vacuum system

Fully automatic high speed diffusion pump vacuum system(Turbomolecular pump optional)