SPECIFICATION
Resolution 4.5nm (Tungsten filament)
Magnification 15×~250,000×
Electron Optical System
1. Electron gun:Tungsten cathode
2. Accelerating voltage :0~30kV
3.Lens
system :Three electron magnetic lens system
4.Objective lens aperture:Three apertures selectable
Specimen Chamber
Six ports for WDS,EDS,BSE detectors and other attachment
installation
Specimen Stage
1. Standard Stage Displacement:X=50mm,Y=50mm,Z=25mm;
T=-5°~+90°,R=360°
2. Large Stage Displacement:X=80mm,Y=50mm,Z=30mm;T=0° ~+90°,R=360°
Computer System
Microsoft™ Windows™ XP operation system
Image Display
Digital image,1024×768 frame and display resolution
17 LCD monitor
Scanning
Mode
Plane,line and spot scan.Dual magnification and screen split
Operate And Control Software
The whole new operate software contributes to excellent convenience and easiness and easiness of SEM operation by using only
mouse and keyboard.Parameters of SEM operation can be stored and easily managed.
Image Processing And Analyzing
1. Image enhancement
2. Threshold transformation
3. Particle statistic analysis
4.
Morphology transformation
5. Gray level histogram display
6. Pseudo-colour transform for gray scale
image.
Image Output And Record
1. Ultra high-resolution(2500 lines)scope for photographing
2.
Versatile image document formats
3.support digital monochrome printer and versatile print-out equipments with
standard interface
Vacuum System
Fully automatic high speed diffusion pump vacuum system (Turbomolecular
pump optional)
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